A Noise Floor, g VRC, High Efficiency MEMS Capacitive Accelerometer Using High-Voltage Orthogonal Excitation Technique Abstract: This work presents a high-voltage orthogonal excitation (HVOE) based ...
Abstract: This article presents a novel approach to realize an electrochemical angular accelerometer with a compact size and a wide measurement range. For the first time, anodic bonding technology was ...
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